KPY62-RK Datasheet PDF - Siemens


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KPY62-RK
Siemens

Part Number KPY62-RK
Description (KPY62-RK - KPY66-RK) Silicon Piezoresistive Pressure Sensor
Page 3 Pages

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Silicon Piezoresistive
Pressure Sensor
KPY 62-RK
KPY 66-RK
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Metal housing
Similar to TO-39-3
Type and
Marking
KPY 62 RK
KPY 63 RK
KPY 64 RK
KPY 65 RK
KPY 66 RK
Symbol Pressure Range Unit
P0 PN
0 600
0 1.6
04
0 10
0 25
mbar
bar
Pin Configuration
1 Temp.- Sensor
(typ. R25 = 2 k)
2 Not connected
3 + VIN; Temperature sensor
4 VOUT
5 No pin
6 Shielding, to be connected
to + VIN
7 VIN
8 + VOUT
Ordering Code
Q62705-K319
Q62705-K320
Q62705-K321
Q62705-K322
Q62705-K292
Semiconductor Group
1
1998-05-11



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KPY 62-RK
KPY 66-RK
Absolute Maximum Ratings
Parameter
Pressure overload
KPY 65 RK
KPY 66 RK
Operating temperature range
Storage temperature range
Supply voltage
Symbol
Limit Values1) Unit
Frontside Rearside
PMAX
20
50
bar
10
10
TA
40 … + 125
˚C
Tstg
40 … + 125
˚C
VIN 12 V
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
min. typ. max.
Bridge resistance
Sensitivity
KPY 65 RK
KPY 66 RK
RB
s
48
3.6 5.2 8.0
1.1 2.1 3.0
Output voltage
KPY 65 RK
KPY 66 RK
Vfin
180 260 400
150 260 370
Offset voltage
P = P0
V0
Linearity error (Best fit straight line)
P0 = P0 PN
FL
KPY 65 66 RK
25
+ 25
− ± 0.3 ± 0.5
Pressure hysteresis
PH
P1 = P0, P2 = PN, P3 = P0 KPY 65 66 RK
− ± 0.1
Unit
k
mV/
Vbar
mV
mV
% Vfin
% Vfin
Semiconductor Group
2
1998-05-11



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KPY 62-RK
KPY 66-RK
Electrical Characteristics
at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min. typ. max.
Temperature coefficient of Vfin
TCVfin
KPY 65 66 RK
%/K
0.22 0.18 0.15
Temperature coefficient of V0
TCV0
KPY 65 66 RK
0.02
%/K
+ 0.02
Temperature coefficient of RB
TCRB
KPY 65 66 RK
+ 0.23
%/K
Temperature hysteresis of V0; Vfin
TH
KPY 65 66 RK
± 0.2
% v. Vfin
Package Outline
Similar to TO-39-3
Basic Component
16 ±0.1
12 ±0.1
8 ±0.5
2.6 max Bond Wire
Loop
View on Chip
9.3 -0.2
5
64
7
8
3
2
1
Component Delivery Form
22.2±0.6
18.2±0.6
14.2±0.6
5.08
3.59
Weight approx. 2.0 g
8±0.6
5 ±0.6
6.2 ±0.6
45˚
GMT05804
Dimensions in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
3
1998-05-11




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